Table II from A Unified Framework for Layout Pattern Analysis with Deep Causal Estimation | Semantic Scholar (2024)

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@article{Chen2021AUF, title={A Unified Framework for Layout Pattern Analysis with Deep Causal Estimation}, author={Ran Chen and Shoubo Hu and Zhitang Chen and Shengyu Zhu and Bei Yu and Pengyun Li and Cheng Chen and Yu Huang and Jianye Hao}, journal={2021 IEEE/ACM International Conference On Computer Aided Design (ICCAD)}, year={2021}, pages={1-9}, url={https://api.semanticscholar.org/CorpusID:245129585}}
  • Ran Chen, Shoubo Hu, Jianye Hao
  • Published in IEEE/ACM International… 1 November 2021
  • Computer Science, Engineering
  • 2021 IEEE/ACM International Conference On Computer Aided Design (ICCAD)

A novel layout-aware diagnosis-based layout pattern analysis framework is proposed to identify the root cause efficiently and outperforms a commercial tool with higher accuracies and around x8.4 speedup on average.

6 Citations

Background Citations

3

Methods Citations

1

Figures and Tables from this paper

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  • table I
  • table II
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Topics

Average Causal Effect (opens in a new tab)Layout Patterns (opens in a new tab)Systematic Defects (opens in a new tab)Speedup (opens in a new tab)Contrastive Learning (opens in a new tab)Structural Causal Model (opens in a new tab)Encoder Network (opens in a new tab)Clusters (opens in a new tab)

6 Citations

A Unified Framework for Layout Pattern Analysis With Deep Causal Estimation

A novel layout-aware diagnosis-based layout pattern analysis framework is proposed to identify the root cause efficiently and outperforms a commercial tool with higher accuracies and around $\times 8.4$ speedup on average.

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This article develops a new end-to-end hotspot detection flow where layout feature embedding and hotspots detection are jointly performed and an attention mechanism-based deep convolutional neural network is exploited as the backbone to learn embeddings for layout features and classify the hotspots simultaneously.

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    Engineering, Computer Science

    2022 IEEE International Test Conference (ITC)

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RCANet is developed, an end-to-end unsupervised learning-based RCA framework, which analyses diagnosis reports of failing dies within a wafer and identifies both layout-aware and cell-internal root causes efficiently.

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  • 2023

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    Hao GengQi SunTinghuan ChenQi XuTsung-Yi HoBei Yu

    Engineering, Computer Science

    2023 28th Asia and South Pacific Design…

  • 2023

This paper will survey the recent pace of progress on advanced methodologies for wafer failure pattern recognition, especially for mixed-type one, and hopes this literature review can highlight the future directions and promote the advancement of the waferFailure pattern recognition.

  • 1
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Techniques for CAD Tool Parameter Auto-tuning in Physical Synthesis: A Survey (Invited Paper)
    Hao GengTinghuan ChenQi SunBei Yu

    Engineering, Computer Science

    2022 27th Asia and South Pacific Design…

  • 2022

This paper will survey the recent pace of progress on advanced parameter auto-tuning flows of physical synthesis tools to reduce human cost and tool evaluation cost and hopes this survey can enlighten the future development of parameterAuto- Tuning methodologies.

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    Computer Science, Engineering

    2017 54th ACM/EDAC/IEEE Design Automation…

  • 2017

A deep learning framework for high performance and large scale hotspot detection is developed and a biased learning algorithm is proposed to train the convolutional neural network to further improve detection accuracy with small false alarm penalties.

  • 107
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Automatic Identification of Yield Limiting Layout Patterns Using Root Cause Deconvolution on Volume Scan Diagnosis Data
    Wu-Tung ChengR. Klingenberg Atul Chittora

    Computer Science, Engineering

    2017 IEEE 26th Asian Test Symposium (ATS)

  • 2017

in many cases, the main cause of yield loss is a specific layout pattern that is difficult to manufacture and is prone to causing an open or short defect. This situation is getting worse with

  • 9
LithoROC: Lithography Hotspot Detection with Explicit ROC Optimization
    Wei YeYibo LinMeng LiQiang LiuD. Pan

    Computer Science, Engineering

    2019 24th Asia and South Pacific Design…

  • 2019

This work proposes the use of the area under the ROC curve (AUC), which provides a more holistic measure for im-balanced datasets compared with the previous methods, and proposes the surrogate loss functions for direct AUC maximization as a substitute for the conventional crossentropy loss.

  • 23
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Faster Region-based Hotspot Detection
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A new end-to-end framework that can detect multiple hotspots in a large region at a time and promise a better hotspot detection performance is developed and Experimental results show that this framework enables a significant speed improvement over existing methods with higher accuracy and fewer false alarms.

  • 46
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LASIC: Layout Analysis for Systematic IC-Defect Identification Using Clustering
    W. TamR. D. Blanton

    Computer Science, Engineering

    IEEE Transactions on Computer-Aided Design of…

  • 2015

By clustering images of the layout locations that correspond to diagnosed sites for a statistically large number of IC failures, LASIC uncovers the common layout features and is found to be effective.

  • 21
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Systematic defect identification through layout snippet clustering
    W. TamO. PokuShawn Blanton

    Computer Science, Engineering

    2010 IEEE International Test Conference

  • 2010

A method that uses diagnosis to identify layout features that do not yield as expected and clustering techniques are applied to layout snippets of diagnosis-implicated regions from (ideally) a statistically-significant number of IC failures for identifying feature commonalties.

  • 40
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Determining a Failure Root Cause Distribution From a Population of Layout-Aware Scan Diagnosis Results
    B. BenwareC. SchuermyerManish SharmaT. Herrmann

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This work focuses on significantly increasing the value of test data and the yield learning rate, which is a critical factor in the success of an IC in the market place.

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Volume diagnosis data mining for root cause identification based on statistical methods is used to reduce turnaround time and cost to speed up the process of systematic defect identification.

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    Table II from A Unified Framework for Layout Pattern Analysis with Deep Causal Estimation | Semantic Scholar (2024)
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